A.Holovatyy, V. Teslyuk, M. Lobur

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Abstract. The article presents Verilog – AMS mod-el of the comb-drive sensing element of the integrated capacitive microaccelerometer. The suggested model al-lows to simulate the reaction of the sensing element ef-fected by the applied force of acceleration, changes of its comb-drive capacities, output voltages and currents for determining its constructive parameters and for analysis of the mechanical module of the integrated de-vice at the behavioral level of computer-aided design.

Key words: micro-electro-mechanical systems (MEMS), micromachining technologies, micromechani-cal comb-drive sensing element, integrated capacitive microaccelerometer, acceleration, SMASH, Verilog – AMS hardware description language, computer-aided design.

Verilog – ams model of comb-drive sensing element of integrated capacitive microaccelerometer for behavioral level of computer aid design

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