Vasyl Teslyuk, Andriy Holovatyy, Hamza Ali Alshawabkeh
Abstract. In this paper the basic acoustic elements models are developed on the base of the VHDL-AMS language. Constructed models are based on the thin plates theory and are intended to be used in computer-aided design at the schematic level of basic acoustic MEMS elements. The results of the models for basic acoustic elements of piezoelectric and electrostatic types investigation are also presented.
Key words: microelectromechanical systems (MEMS), VHDL-AMS model, basic acoustic element, schematic design level.